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Model
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V-1000
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V-1000X
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V-1000XS
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 PlasmaMode
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RIEand DP
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 MainUnit
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Electrodestructure
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Parallel flat stage plate
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Stagesize
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280mmW×280mmD
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300mmW×300mmD(Double stage)
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400mmW×375mmD
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Chambersize
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400mmW×400mmD×380mmH
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400mmW×400mmD×380mmH
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600mmW×554mmD×440mmH
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Vacuumgauge
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Capacitance manometer
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Reactiongas system
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Twosystems
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Controller
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Programmable controller
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Display
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Programmable terminal (touch panel)
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Radio-FrequencyPower Supply
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Input
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AC200/220/380V,Three phase,
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Radio-frequency output power
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1,000W
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1,000& 1,500W
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Referenceoscillator
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Quartz oscillator
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Oscillating frequency
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13.56MHz
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Matchingadjustment
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Automatic tuning
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Discharge System(Vacuum Pump)
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Displacement
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670 &1,000liters/min.
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670 &1,500liters/min.
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1,000 &1,500liters/min.
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Inletconfiguration
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NW40with a flexible stainless steel hose (1 meter long)
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Outletconfiguration
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NW40
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GasSystems
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Purgegas
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Nitrogen (N2) and a regulator (3 kgf/cm2) withamanometer
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Drivinggas
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Airornitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) withamanometer
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Reactiongas G1
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Oxygen (O2) and a mass flow controller (1000 secm)
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Reactiongas G2
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Argon(Ar) and a mass flow controller (100 secm)
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SafetyMechanisms
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SystemProtections
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*Oscillator protection circuit *Front-door interlockswitch(interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuumleaktest function
*Air-purge end buzzer *Alarm buzzer *Emergency stoppush-buttonswitch
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Actions againstatrouble of the vacuum pump
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Theplasma scrubber takes the counteractions listed below andshow anAlarm message on its display when something wrong happens onthevacuum pump.
*The main valve closes *The gas feed valve closes *Theisolationvalve closes
*The oscillator stops outputting *Treatment process issuspended*The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble ofthevacuum pump
*The treatment process timer stops
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REQUIREDUTILITIES
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 PowerSupply
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Main unitwith vacuum pump
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Threephases, AC220V, 30 A, 60Hz (with an accessory power cableof 3meters long, and exposed crimp-style terminals of 8millimeterslong)
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 Gases
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Drivinggas
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Airornitrogen (N2) (Feed pressure: 5～7 kgf/cm2)
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Purgegas
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Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)
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Reactiongas G1
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Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
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Reactiongas G2
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Argon(Ar) (Feed pressure: 1.5 kgf/cm2)
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Connectionport
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1/4"swagelok joint bulkhead union (SS-400-61)
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Note:Pressure regulators, filters and other protective devicesshall beprepared by others.
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Connection Diameter of the Discharge Duct (and inletPort)
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Vacuumpump's inlet port
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NW4O(with a flexible stainless steel hose of 1 meterlong)
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Vacuumpump's outlet port
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NW4O
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Mainunit's ozone outlet port
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163mmdiameter
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Oscillator's ventilation port
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163mmdiameter
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Note:Every port has a connector designed for a flexible hose.Connect aduct to these inlet and outletports.
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