產(chǎn)品[
Model 206A
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產(chǎn)品名稱:
Model 206A
產(chǎn)品型號(hào):
Model 206A
產(chǎn)品展商:
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簡(jiǎn)單介紹
Model 206A
No.1 share in domestic market
Handles 100 to 200 mm square wafer
Batch: 200 to 400 wafers processing is available(depends on flat zone length and wafer pitch)
Model 206A的詳細(xì)介紹
Model 206A:

No.1 share in domestic market
Handles 100 to 200 mm square wafer
Batch: 200 to 400 wafers processing is available(depends on flat zone length and wafer pitch)
First heating up and cooling down, reduced power by KTS' exclusive LGO heater
| Outer dimension | | W850×L6700×H2500mm (three-stage furnace) |
|---|
| Heater | LGO heater |
|---|
| Flat zone length | 1000mm |
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| Temp. control | 3~5 Zone |
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| Transfer equipment | Boat loader |
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