Air tight oven chamber and automatic gas control.
Heat to 600 deg-C and keep oxygen concentration less than 20 ppm.
The best for ceramic degreasing.
Cool-down from 600 to 100 deg-C within 150 min (INH-21CD)
Air tight with oil seal and door seal
Lots of field results for ceramics and glass substrate
Glass substrate, ceramic degreasing (Please contact us about safety feature.) 
Oxygen concentration meter, signal tower, inverter, optional gas line, emergency stop
| INH series specifications |
|---|
| Method | Convection (Side-flow) |
|---|
| Maximum temperature(*1) | 600 deg-C |
|---|
| Operation temperature(*1) | RT+60~600 deg-C |
|---|
| Temperature distribution(*2) | ±8(at 600),±5(at 350) deg-C |
|---|
| Oxygen concentration | Less than 20 ppm |
|---|
| Load capacity | 15 kg/1 sheet |
|---|
| Chamber pressure metar | 0~2kPa |
|---|
| Thermocouple | Type-K |
|---|
| System control | Programmed controller |
|---|
| Accuracy | ±0.1%FS±1digit |
|---|
| Recipes | 19(30segment/recipe) |
|---|
| Temperature control | Auto tuning PID control |
|---|
| Cooling system | Forced cooling |
|---|
| Safety feature | Electric leak breaker, over-heat protection,
motor over-load protection, control circuit breaker |
|---|
| Accessories | 2 shelves (with shelf plates)*except INH-100CD,
temperature recorder |
|---|
(*1) Figures at control point in a heating chamber.
(*2) Valid dimension is two-thirds inside dimension.
☆Cooling water is necessary to protect seal packing.
☆Thermocouples are consumable supplies. |
| | INH-9CD | INH-21CD | INH-51CD | INH-100CD |
|---|
Max. operation temperature time
(Reference)
(*1) | Within 120
minutes
(RT-60~600
deg-C) | Within 90
minutes
(RT-60~600
deg-C) | Within 90
minutes
(RT-60~600
deg-C) | Within 90
minutes
(RT-60~600
deg-C) |
|---|
| O2 concentration | Within 50 minutes
(N2⋅50L/min introduce) | Within 60 minutes
(N2⋅90L/min introduce) | Within 90 minutes
(N2⋅150L/min introduce) | Within 90 minutes
(N2⋅250L/min introduce) |
|---|
| Heater power | 7.5kW(at 200V) | 12.0kW(at 200V) | 25.2kW(at 200V) | 44.1kW(at 200V) |
|---|
Outside dimension
(mm) | 1105(W)
×1650(H)
×840(D) | 1255(W)
×1800(H)
×1120(D) | 1550(W)
×1820(H)
×1360(D) | 1800(W)
×2115(H)
×1570(D) |
|---|
Inside dimension
(mm) | 450(W)
×450(H)
×450(D) | 600(W)
×600(H)
×600(D) | 800(W)
×800(H)
×800(D) | 1000(W)
×1000(H)
×1000(D) |
|---|
| Equipment weight | 450kg | 700kg | 1000kg | 1550kg |
|---|
| Exhaust port | 1B ball valve | 1 1/2 2B ball valve |
|---|
| Breaker capacity | AC 200V 30A
3 phases 50/60 Hz | AC 200V 50A
3 phases 50/60 Hz | AC 200V 100A
3 phases 50/60 Hz | AC 200V 150A
3 phases 50/60 Hz |
|---|